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Alleman Hall McCoy Russell & Tuttle LLP
806 SW Broadway, Ste. 600
Portland, OR 97205
U.S.A.
Tel: (503) 459-4141
Fax: (503) 459-4142
www.ahmrt.com |
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Technical Consultant

Tel: (503) 459-4141
Education
- Ph.D., Chemical Engineering, University of Delaware, Newark, Delaware
- B.S., Chemical Engineering, Louisiana State University, Baton Rouge,
Louisiana, Magna Cum Laude
- National Science Foundation Graduate Research Fellow
Professional Experience
- Adrian B. Sherrill, Ph.D. worked as a senior process development
engineer for the Logic Technology Development division of Intel Corporation,
specializing in the pathfinding and development of novel thin-film deposition
processes and equipment.
- Professional experience in atomic layer deposition, low-pressure chemical
vapor deposition, and physical vapor deposition processes for metals, metal
oxides, silicon oxides, and silicon nitrides, including thermal and
plasma-enhanced deposition methods.
- Research experience in heterogeneous catalysis and surface electron spectroscopy.
- Author of numerous publications in academic journals and conference proceedings.
- United States Patents:
- USPTO 7,074,680. “Method for making a semiconductor
device having a high-k gate dielectric.”
- USPTO 7,084,038. “Method for making a semiconductor
device having a high-k gate dielectric.”
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